Semiconductor device and operating method thereof

ABSTRACT

A semiconductor device includes a memory string that includes a plurality of memory cells and is coupled between a source line and a bit line. A method for operating the semiconductor device may include: boosting a first channel region in a channel region of the memory string, wherein the channel region includes the first channel region at one side of the selected memory cell and a second channel region at the other side of the selected memory cell; applying a pre-program bias to a gate electrode of the selected memory cell, to inject electrons into a space region of the selected memory cell; and applying a program bias to the gate electrode.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.16/502,832 filed on Jul. 3, 2019, which claims benefits of priority of

Korean Patent Application No. 10-2018-0165588 filed on Dec. 19, 2018.The disclosure of each of the foregoing application is incorporatedherein by reference in its entirety.

BACKGROUND Field of Invention

The present disclosure generally relates to an electronic device, andmore particularly, to a semiconductor device and an operating methodthereof.

Description of Related Art

A semiconductor memory system is a storage device implemented using asemiconductor such as silicon (Si), germanium (Ge), gallium arsenide(GaAs), or indium phosphide (InP). The semiconductor memory system maybe generally classified into a volatile memory device and a nonvolatilememory device.

The volatile memory device is a memory device in which stored data islost when the supply of power is interrupted. Examples of the volatilememory device include a Static Random Access Memory (SRAM), a DynamicRAM (DRAM), a Synchronous DRAM (SDRAM), and the like. The nonvolatilememory device is a memory device in which stored data is retained evenwhen the supply of power is interrupted. Examples of the nonvolatilememory device include a Read Only Memory (ROM), a Programmable ROM(PROM), an Electrically Programmable ROM (EPROM), an ElectricallyErasable and Programmable ROM (EEPROM), a flash memory, a Phase-changeRAM (PRAM), a Magnetic RAM (MRAM), a Resistive RAM (RRAM), aFerroelectric RAM (FRAM), and the like. The flash memory is generallyclassified into a NOR type flash memory and a NAND type flash memory.

SUMMARY

Embodiments provide a semiconductor device having improved operatingcharacteristics, and an operating method of the semiconductor device.

In accordance with an aspect of the present disclosure, there isprovided a method for operating a semiconductor device including amemory string that includes a plurality of memory cells and is coupledbetween a source line and a bit line, the method including: boosting afirst channel region in a channel region of the memory string, whereinthe channel region includes the first channel region at one side of theselected memory cell and a second channel region at the other side ofthe selected memory cell; applying a pre-program bias to a gateelectrode of the selected memory cell, to inject electrons into a spaceregion of the selected memory cell; and applying a program bias to thegate electrode.

In accordance with another aspect of the present disclosure, there isprovided a method for operating a semiconductor device including amemory string that includes at least one first select transistor, aplurality of memory cells, and at least one second select transistor,and is coupled between a source line and a bit line, the methodincluding: coupling the memory string to the source line or the bitline; turning off a selected memory cell among the plurality of memorycells; increasing the level of word lines coupled to unselected memorycells among the plurality of memory cells to a pass bias such that achannel region of the memory string is divided into a first channelregion and a second channel region with respect to the selected memorycell, and the first channel region and the second channel region havedifferent potential levels; increasing the level of a word line coupledto the selected memory cell to a pre-program bias greater than the passbias; and applying a program bias to the word line coupled to theselected memory cell.

In accordance with still another aspect of the present disclosure, thereis provided a semiconductor device including: a memory string coupledbetween a source line and a bit line, the memory string including atleast one source select transistor, a plurality of memory cells, and atleast one drain select transistor, wherein a channel region of thememory string includes a first channel region at one side of a selectedmemory cell among the plurality of memory cells and a second channelregion at the other side of the selected memory cell; and a controllogic configured to boost a first channel region, apply a pre-programbias to a gate electrode of the selected memory cell such that electronsare injected into a space region of the selected memory cell, and applya program bias to the gate electrode.

BRIEF DESCRIPTION OF THE DRAWINGS

Example embodiments is described more fully hereinafter with referenceto the accompanying drawings; however, the examples may be embodied indifferent forms and should not be construed as limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the scope of the example embodiments to those skilled in the art.

In the drawing figures, dimensions may be exaggerated for clarity ofillustration. It will be understood that when an element is referred toas being “between” two elements, it can be the only element between thetwo elements, or one or more intervening elements may also be present.

Like reference numerals refer to like elements throughout.

FIG. 1 is a block diagram illustrating a semiconductor device inaccordance with an embodiment of the present disclosure.

FIGS. 2 to 4 are circuit diagrams illustrating a cell array structure ofa semiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 5 is a sectional view illustrating memory cells in accordance withan embodiment of the present disclosure.

FIG. 6 is a flowchart illustrating an operating method of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 7 is a flowchart illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 8 is a diagram illustrating a memory string and potentials of achannel region of the memory string.

FIG. 9 is a timing diagram illustrating an operating method of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 10 is a timing diagram illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 11 is a timing diagram illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 12 is a diagram illustrating a memory string and potentials of achannel region of the memory string.

FIG. 13 is a flowchart illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 14 is a timing diagram illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 15 is a timing diagram illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure.

FIG. 16 is a block diagram illustrating a memory system in accordancewith an embodiment of the present disclosure.

FIG. 17 is a block diagram illustrating a memory system in accordancewith an embodiment of the present disclosure.

FIG. 18 is a block diagram illustrating a computing system in accordancewith an embodiment of the present disclosure.

DETAILED DESCRIPTION

Hereinafter, embodiments in accordance with the present disclosure isdescribed in detail with reference to the accompanying drawings. In thefollowing description, it should be noted that only a portion requiredto understand the operation in accordance with the present disclosure isdescribed, and the description of the remaining portion is omitted so asto not obscure the gist of the present disclosure. The presentdisclosure may, however, be embodied in different forms and should notbe construed as being limited to the embodiments set forth herein.Rather, these embodiments are provided to describe the presentdisclosure in detail to the extent that those skilled in the art towhich the disclosure pertains may easily enforce the technical conceptof the present disclosure.

In the entire specification, when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the another element or be indirectly connectedor coupled to the another element with one or more intervening elementsinterposed therebetween. In addition, when an element is referred to as“including” a component, this indicates that the element may furtherinclude another component instead of excluding another component unlessthe specification states otherwise.

FIG. 1 is a block diagram illustrating a semiconductor device 100 inaccordance with an embodiment of the present disclosure.

Referring to FIG. 1, the semiconductor device 100 includes a cell array110 and a peripheral circuit 120. The semiconductor device 100 may be amemory device, and the memory device may be a nonvolatile memory device.For example, the semiconductor device 100 may be a flash memory device.

The cell array 110 is coupled to an address decoder 121 through rowlines RL, and is coupled to a read and write (read & write) circuit 123through column lines CL. The row lines RL may be word lines, and thecolumn lines CL may be bit lines. However, the word lines and the bitlines are relative concepts. The row lines may be bit lines and thecolumn lines may be word lines.

The cell array 110 includes a plurality of memory strings, and thememory strings may be arranged in a horizontal direction or verticaldirection on a substrate. Also, the cell array 110 includes a pluralityof memory blocks, and each of the memory blocks includes a plurality ofpages. For example, the semiconductor device 100 performs an eraseoperation in units of memory blocks, and performs a program operation orread operation in units of pages.

The peripheral circuit 120 may include the address decoder 121, the read& write circuit 123, an input and output (I/O) circuit 124, and acontrol logic 125.

The control logic 125 may be coupled to the address decoder 121, theread & write circuit 123, and the I/O circuit 124. The control logic 125may receive a command CMD and an address ADDR from the I/O circuit 124,and control the address decoder 121 and the read & write circuit 123 toperform an internal operation according to the received command CMD.

The address decoder 121 may be coupled to the cell array 110 through therow lines RL. For example, the address decoder 121 may be coupled to thecell array 110 through a word line, a dummy word line, a source selectline, and a drain select line. Also, the address decoder 121 may beconfigured to control the row lines RL under the control of the controllogic 125. Therefore, the address decoder 121 may receive an addressADDR from the control logic 125, and select any one of the memory blocksof the cell array 110 according to the received address

ADDR.

Program and read operations of the semiconductor device 100 may beperformed in units of pages. Therefore, in the program and readoperations, the address ADDR may include a block address and a rowaddress. The address decoder 121 may decode the block address in thereceived address ADDR, and select one memory block according to thedecoded block address. The address decoder 121 may decode the rowaddress in the received address ADDR, and select any one page of theselected memory block according to the decoded row address.

An erase operation of the semiconductor device 100 may be performed inunits of memory blocks. Therefore, in the erase operation, the addressADDR includes a block address. The address decoder 121 may decode theblock address and select one memory block according to the decoded blockaddress.

The read & write circuit 123 is coupled to the memory cell array 110through the column lines CL. In a program operation, the read & writecircuit 123 transfers data DATA received from the I/O circuit 124 to thecolumn lines CL, and memory cells of a selected page are programmedaccording to the transferred data DATA. The data DATA may be multi-bitdata to be respectively programmed in the memory cells. In a readoperation, the read & write circuit 123 reads data DATA from memorycells of a selected page through the column lines CL, and outputs theread data DATA to the I/O circuit 124. In an erase operation, the read &write circuit 123 may float the column lines CL. A verify operation maybe included in the program operation and the erase operation. The verifyoperation may be performed in a manner similar to that of the readoperation.

According to the above-described configuration, the control logic 125controls the address decoder 121 and the read & write circuit 123 toboost a channel region at one side of the selected memory cell.Subsequently, the control logic 125 controls the address decoder 121 andthe read & write circuit 123 to apply a pre-program bias to a gateelectrode of a selected memory cell and apply a program bias to the gateelectrode of the selected memory cell.

Therefore, a program operation may be performed after holes in a spaceregion are removed by a pre-program operation. Also, in the pre-programoperation, electrons may be injected into the space region, using hotcarrier injection (HCl). Thus, charge loss caused by lateral spreadingmay be minimized, and data retention characteristics may be improved.

FIGS. 2 to 4 are circuit diagrams illustrating a cell array structure ofa semiconductor device in accordance with an embodiment of the presentdisclosure.

Referring to FIG. 2, a cell array includes a plurality of memory blocksBLK, and each of the memory blocks BLK includes a plurality of memorystrings MS. In addition, the plurality of memory strings MS are coupledbetween bit lines BL1 to BLm and a source line SL. Here, m is an integerof 2 or more.

Each of the memory strings MS includes at least one drain selecttransistor DST, a plurality of memory cells MC, and at least one sourceselect transistor SST, which are coupled in series. Although not shownin the drawing, each of the memory strings MS may further include adummy memory cell located between the source select transistor SST andthe memory cells MC, or between the drain select transistor DST and thememory cells MC. In addition, the memory cells MC included in one memorystring MS may be located at the substantially same level, or be locatedat different levels.

Gate electrodes of the memory cells MC are coupled to word lines

WL. Word line voltages (e.g., a program bias, a pre-program bias, a readbias, and the like) necessary for driving may be applied to each of theword lines WL. Gate electrodes of the drain select transistors DST arecoupled to a drain select line DSL. Gate electrodes of the source selecttransistors SST are coupled to a source select line SSL.

According to the above-described configuration, memory cells MC coupledto the same word line WL which are to be simultaneously programmed mayconstitute one page, and one memory block BLK may include a plurality ofpages.

Referring to FIG. 3, a memory block BLK includes a plurality of memorystrings MS11 to MS1 m and MS21 to MS2 m coupled between bit lines BL1 toBLm and a source line SL. Each of the memory strings MS11 to MS1 m andMS21 to MS2 m may extend along a +Z direction. The +Z direction may be adirection in which memory cells MC are stacked. Here, m is an integer of2 or more.

Each of the memory strings MS11 to MS1 m and MS21 to MS2 m includes atleast one source select transistor SST, a plurality of memory cells MC,and at least one drain select transistor DST, which are sequentiallystacked.

Source select transistors SST included in one of the memory strings MS11to MS1 m and MS21 to MS2 m may be coupled in series between the memorycells MC and the source line SL. Also, source select transistors SST atthe same level may be coupled to the same source select line SSL.

Drain select transistors DST included in one of the memory strings MS11to MS1 m and MS21 to MS2 m may be coupled in series between the bitlines BL1 to BLm and the memory cells MC. Drain select transistors DSTat the same level among the drain select transistors DST of the memorystrings MS11 to MS1 m and MS21 to MS2 m, which are arranged on the samerow (in a +X direction), may be coupled to the same drain select lineDSL. In addition, drain select transistors DST arranged on differentrows (in the +X direction) may be coupled to different drain selectlines DSL.

Referring to FIG. 4, a memory block BLK includes a plurality of memorystrings MS11 to MS1 m and MS21 to MS2 m. Each of the memory strings MS11to MS1 m and MS21 to MS2 m may include at least one source selecttransistor SST, a plurality of memory cells MC, at least one pipetransistor PT, a plurality of memory cells MC, and at least one drainselect transistor DST, which are coupled in series. Each of the memorystrings MS11 to MS1 m and MS21 to MS2 m may be arranged in a ‘U’ shape.

The pipe transistor PT couples drain-side memory cells MC andsource-side memory cells MC to each other. In addition, a gate of thepipe transistor PT of each of the memory strings MS11 to MS1 m and MS21to MS2 m may be coupled to a pipe line PL. The remaining structure issimilar to that described with reference to FIG. 3, thus, overlappingdescriptions will be omitted.

FIG. 5 is a sectional view illustrating memory cells in accordance withan embodiment of the present disclosure.

Referring to FIG. 5, each of the memory cells MC may include a channellayer CH, a memory layer M, and a gate electrode G. The memory layer Mis used to store data, and may include a tunnel insulating layer, a datastorage layer, and a charge blocking layer. For example, the datastorage layer may include a floating gate, a charge trapping material,poly-silicon, nitride, a nano-structure, a variable resistance material,and the like.

Memory cells included in one memory string may share the channel layerCH and the memory layer M. For example, the memory layer M and thechannel layer CH extend up to space regions SP between the memory cellsMC.

According to this structure, holes may exist in a space region SPbetween adjacent memory cells MC, and therefore, data retentioncharacteristics may be degraded. For example, during an erase operation,holes injected into the memory layer M remain in the space region SP.Charges of a programmed memory cell MC are combined with the holes ofthe space region SP due to lateral spreading. That is, charge loss mayoccur.

Therefore, in an embodiment of the present disclosure, a pre-programoperation for removing holes remaining in the space region SP isperformed prior to a program operation. For example, a pre-programoperation of injecting electrons into the space region SP, using hotcarrier injection (HCl), is performed after the channel layer CH ofmemory cells MC having an erase state is partially boosted.

FIG. 6 is a flowchart illustrating an operating method of asemiconductor device in accordance with an embodiment of the presentdisclosure. The semiconductor device may include the cell arraydescribed with reference to FIGS. 2 to 4. For example, a memory string

MS is coupled between a source line SL and a bit line BL. The memorystring MS includes a plurality of memory cells MC1 to MCk.

Referring to FIG. 6, a pre-program operation is performed on a selectedmemory cell MC of a selected memory string MS (S510). The pre-programoperation may be performed using hot carrier injection (HCl).

In the pre-program operation, first, a first channel region in channelregions of the memory string MS is boosted. The channel regions of thememory string MS may include a first channel region at one side of theselected memory cell MC and a second channel region at the other side ofthe selected memory cell MC. The first channel region is adjacent to thesource line or the bit line. For example, the one side may be a sourceside, and the other side may be a drain side. Alternatively, the oneside may be the drain side, and the other side may be the source side.

As described above, the channel region of the memory string MS isdivided with respect to the selected memory cell MC, and only the firstchannel region is boosted, so that the second channel region is notboosted. That is, the channel region of the memory string MS ispartially boosted. For example, the potential of a channel region at asource side of the selected memory cell MC (i.e., a source-side channelregion) is boosted, but the potential of a channel region at a drainside of the selected memory cell MC (i.e., a drain-side channel region)is not boosted. Alternately, the potential of the drain-side channelregion is boosted, but the potential of the source-side channel regionis not boosted.

Accordingly, a potential level difference occurs between the firstchannel region and the second channel region, and a hot carrierinjection condition is prepared.

Subsequently, a pre-program bias is applied to a gate electrode of theselected memory cell MC. Accordingly, hot carriers are generated, andthe generated hot carriers are injected into a space region SP of theselected memory cell MC. That is, the pre-program operation may beperformed using the hot carrier injection, and holes existing in thespace region SP may be removed. The space region SP may be a regionbetween adjacent memory cells MC, or be a region between adjacent wordlines WL.

Subsequently, a program operation is performed (S520). A program bias isapplied to the gate electrode of the selected memory cell MC. Forexample, the program operation is performed by applying the program biasto a selected word line WL and applying a pass bias to unselected wordlines WL. The pre-program bias may have a level less than that of theprogram bias.

According to the operating method described above, the program operationmay be performed after holes existing in the space region are removed bythe pre-program operation using the hot carrier injection. Thus, chargeloss caused by the holes of the space region may be prevented, andretention characteristics of the semiconductor device may be improved.

FIG. 7 is a flowchart illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure. FIG. 8 is a diagram illustrating a memory string MS andpotentials of a channel region of the memory string MS.

The semiconductor device may include the cell array described withreference to FIGS. 2 to 4. For example, a memory string MS is coupledbetween a source line SL and a bit line BL. The memory string MSincludes at least one first select transistor, a plurality of memorycells MC1 to MCk, and at least one second select transistor. The firstselect transistor may be a source select transistor SST or a drainselect transistor DST, and the second select transistor may be a drainselect transistor DST or a source select transistor SST. In addition, nand k may be integers. Hereinafter, a case where the first selecttransistor is a source select transistor SST and the second selecttransistor is a drain select transistor DST is described.

A channel region of the memory string MS includes a first channel regionand a second channel region with respect to a selected memory cell MCn.For example, unselected memory cells MC1 to MCn−1 located between theselected memory cell MCn and the first select transistor SST may befirst side memory cells, and a channel region of the unselected memorycells MC1 to MCn−1 may be the first channel region. In addition,unselected memory cells MCn+1 to MCk located between the selected memorycell MCn and the second select transistor DST may be second side memorycells, and a channel region of the unselected memory cells MCn+1 to MCkmay be the second channel region. Hereinafter, a case where the firstside memory cells are source-side memory cells, the first channel regionis a source-side channel region S_CH, the second side memory cells aredrain-side memory cells, and the second channel region is a drain-sidechannel region D_CH is described.

Referring to FIGS. 7 and 8, first, the second select transistor DST isturned on, to couple the memory string MS and the bit line BL to eachother (S710). The bit line BL may have a first level L1, and the firstlevel L1 may be a ground level. Alternatively, the first selecttransistor SST is turned on, to couple the memory string MS to thesource line SL (Refer to FIGS. 11 and 12).

When the second select transistor DST is turned on, the first selecttransistor SST may be turned off. Therefore, the memory string MS isseparated from the source line SL. When the second select transistor DSTis turned on, the memory cells MC1 to MCk may be turned off. Therefore,a drain terminal of the channel region of the memory string MS iscoupled to the bit line BL, but a ground bias is not transferred to thefirst channel region S_CH and the second channel region D_CH.

Subsequently, a pass bias Vpass is applied to gate electrodes of theunselected memory cells MC1 to MCn−1 and MCn+1 to MCk (S720).

Accordingly, the unselected memory cells MCn+1 to MCk are turned on. Inaddition, since the second select transistor DST maintains a turn-onstate, electrons E are injected into the second channel region D_CH.Therefore, the second channel region D_CH has the first level L1, e.g.,the ground level.

In addition, since the pass bias Vpass is also applied to the gateelectrodes of the unselected memory cells MC1 to MCn−1, the floatedfirst channel region S_CH has a potential of a second level L2 differentfrom the first level L1. That is, the first channel region S_CH isboosted (B) to the second level L2 greater than the first level L1. Thedegree to which the first channel region S_CH is boosted may be adjustedaccording to the pass bias Vpass.

Since the ground bias or a negative bias Vneg is applied to a gateelectrode of the selected memory cell MCn, the selected memory cell MCnmaintains a turn-off state. Therefore, the flow of charges between thefirst channel region S_CH and the second channel region D_CH is blocked.Accordingly, a potential level difference D between the first channelregion S_CH and the second channel region D_CH exists, and thus hotcarrier injection generation environment is created.

Subsequently, a pre-program bias Vpre is applied to the gate electrodeof the selected memory cell MCn (S730). The pre-program bias Vpre mayhave a level greater than that of the pass bias Vpass. Accordingly, hotcarriers Hot E are generated, and the generated hot carriers Hot E maybe injected into a space region of the selected memory cell MCn. The hotcarriers Hot E may be hot electrons.

Hot carriers Hot E may be generated in a space region between theselected memory cell MCn and unselected memory cell MCn+1 at the secondside, and the generated hot carriers Hot E may be injected into a spaceregion between the selected memory cell MCn and unselected memory cellMCn−1 at the first side. Thus, holes in the space region of the selectedmemory cell MCn may be removed.

FIG. 9 is a timing diagram illustrating an operating method of asemiconductor device in accordance with an embodiment of the presentdisclosure. The semiconductor device may include the cell arraydescribed with reference to FIGS. 2 to 4. Hereinafter, descriptions ofcontents overlapping with the above-described contents will be omitted.

Referring to FIG. 9, first, at a first time t1, a bias of a first levelis applied to the bit line BL, and the level of the drain select lineDSL is increased to a turn-on bias Von. The first level may be a groundlevel.

Accordingly, a memory string MS is coupled to the bit line BL.

At a second time t2, the selected word line sel_WL maintains the groundlevel, or is decreased to a negative level. When a negative bias Vneg isapplied to the selected word line sel_WL, the flow of charges betweenthe first channel region S_CH and the second channel region D_CH may bemore perfectly blocked.

At a third time t3, the level of the unselected word lines unsel_WL isincreased to the pass bias Vpass. Since the source select line SSLmaintains a turn-off level and the selected word line maintains theground level or the negative level, the floated first channel regionS_CH is boosted to a second level. In addition, since the drain selectline DSL maintains a turn-on level, the second channel region D_CH hasthe ground level. Accordingly, a difference in potential level betweenthe first channel region S_CH and the second channel region D_CH occurs,and a hot carrier injection generation condition is prepared.

At a fourth time t4, the level of the selected word line sel_WL isincreased to the pre-program bias Vpre. The pre-program bias Vpre mayhave a level greater than that of the pass bias Vpass.

Accordingly, hot carriers are generated in a channel region between theselected word line sel_WL and the unselected word line unsel_WL. Inaddition, hot carriers may be injected into the space region of theselected memory cell MCn by the pre-program bias Vpre. For example, hotelectrons Hot E may be injected into the space region of the selectedmemory cell MCn, using hot carrier injection.

At a fifth time t5, the levels of the selected word line sel_WL and theunselected word line unsel_WL are decreased to the ground level.Accordingly, the selected memory cells MCn and the unselected memorycells MC are turned off.

At a sixth time t6, the level of the drain select line DSL is decreasedto the ground level. Accordingly, the drain select transistor DST isturned off, and the memory string MS is separated from the bit line BL.

FIG. 10 is a timing diagram illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure. The semiconductor device may include the cell arraydescribed with reference to FIGS. 2 to 4. Hereinafter, descriptions ofcontents overlapping with the above-described contents will be omitted.

Referring to FIG. 10, at a first time t1, the ground bias is applied tothe bit line BL, and the level of the drain select line DSL is increasedto the turn-on bias Von. Accordingly, the memory string MS is coupled tothe bit line BL.

At a second time t2, the selected word line sel_WL maintains the groundlevel, or is decreased to the negative level Vneg. The level of a wordline n_unsel_WL (hereinafter, referred to as an adjacent word line)adjacent to the selected word line sel_WL among the unselected wordlines may also be decreased to the negative level Vneg. The term“adjacent word line” may mean word lines located just next to theselected word line sel_WL. For example, when an n-th word line WLn isselected, the adjacent word line n_unsel_WL may include an (n−1)-th wordline WLn−1 and an (n+1)-th word line WLn+1. Alternatively, the adjacentword line n_unsel_WL may include only the (n−1)-th word line WLn−1, orinclude only the (n+1)-th word line WLn+1.

At a third time t3, the level of the unselected word lines unsel_WL isincreased to the pass bias Vpass. Like the selected word line sel_WL,the adjacent word lines n_unsel_WL maintain the ground level or thenegative level Vneg. Accordingly, the source-side channel region isboosted, and the drain-side channel region has the ground level.

At a fourth time t4, the level of the selected word line sel_WL isincreased to the pre-program bias Vpre. The level of the adjacent wordlines n_unsel_WL is also increased to the pre-program bias Vpre.Accordingly, hot electrons Hot E may be injected into space regionsbetween the selected memory cell MCn and adjacent memory cells MCn−1 andMCn+1. For example, electrons may be injected into the space regionbetween the selected memory cell MCn and the adjacent memory cell MCn−1and the space region between the selected memory cell MCn and theadjacent memory cell MCn+1.

At a fifth time t5, the levels of the selected word line sel_WL, theadjacent word line n_unsel_WL, and the unselected word line unsel_WL aredecreased to the ground level. Accordingly, the selected memory cellMCn, the adjacent memory cells MCn−1 and MCn+1, and the unselectedmemory cells MC are turned off.

At a sixth time t6, the level of the drain select line DSL is decreasedto the ground level. Accordingly, the drain select transistor DST isturned off, and the memory string MS is separated from the bit line BL.

According to the operating method described above, the adjacent wordlines n_unsel_WL are driven substantially identically to the selectedword line sel_WL. Thus, coupling between word lines may be reduced, andthe first channel region and the second channel region may be separatedfrom each other.

FIG. 11 is a timing diagram illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure. FIG. 12 is a diagram illustrating a memory string MS andpotentials of a channel region of the memory string MS. Thesemiconductor device may include the cell array described with referenceto FIGS. 2 to 4. Hereinafter, descriptions of contents overlapping withthe above-described contents will be omitted.

Referring to FIGS. 11 and 12, first, at a first time t1, a bias of afirst level L1 is applied to the source line SL, and the level of thesource select line SSL is increased to the turn-on bias Von. The firstlevel L1 may be a ground level. Accordingly, the memory string MS iscoupled to the source line SL. Since the memory cells MC1 to MCk havethe turn-off state, the ground bias is not transferred to thesource-side channel region S_CH. When the source select transistor SSTis turned on, the drain select transistor DST may be turned off.

At a second time t2, the selected word line sel_WL maintains the groundlevel, or is decreased to the negative level Vneg. The negative biasVneg is applied to the selected word line sel_WL, so that the flow ofcharges between the source-side channel region S_CH and the drain-sidechannel region D_CH may be blocked.

At a third time t3, the level of the unselected word lines unsel_WL isincreased to the pass bias Vpass. Since the drain select line DSLmaintains the turn-off level and the selected word line sel_WL maintainsthe ground level or the negative level Vneg, the floated second channelregion D_CH is boosted (B) to a second level L2. In addition, since thesource select line SSL maintains the turn-on level, the first channelregion S_CH has the ground level. Accordingly, a difference D inpotential level between the first channel region S_CH and the secondchannel region D_CH occurs, and a hot carrier injection generationcondition is prepared.

At a fourth time t4, the level of the selected word line sel_WL isincreased to the pre-program bias Vpre. The pre-program bias Vpre mayhave a level greater than that of the pass bias Vpass. Therefore, hotelectrons Hot E may be injected into the space region of the selectedmemory cell MCn, using hot carrier injection.

At a fifth time t5, the levels of the selected word line sel_WL and theunselected word line unsel_WL are decreased to the ground level.Accordingly, the selected memory cell MCn and the unselected memorycells MC are turned off.

At a sixth time t6, the level of the source select line SSL is decreasedto the ground level. Accordingly, the source select transistor SST isturned off, and the memory string MS is separated from the source lineSL.

FIG. 13 is a flowchart illustrating a pre-program operation of asemiconductor device in accordance with an embodiment of the presentdisclosure. The semiconductor device may include the cell arraydescribed with reference to FIGS. 2 to 4. Hereinafter, descriptions ofcontents overlapping with the above-described contents will be omitted.

Referring to FIG. 13, the source line SL or the bit line BL isprecharged and a channel region of a memory string is precharged throughthe source line SL or the bit line BL (S1310). Accordingly, the channelregion of the memory string is precharged to a predetermined level.

Subsequently, the pass bias Vpass is applied to the unselected wordlines unsel_WL (S1320). Since the selected word line sel_WL maintainsthe ground level or the negative level Vneg, the first channel region isboosted, and the second channel region has the ground level.Accordingly, a hot carrier injection condition is prepared.

Subsequently, the pre-program bias is applied to the selected word linesel_WL (S1330). Accordingly, hot carriers are injected into the spaceregion of the selected memory cell.

According to the operating method described above, the channel region isentirely precharged through the bit line or the source line before thefirst channel region is boosted. Thus, the first channel region may beboosted to a higher level.

FIG. 14 is a timing diagram illustrating a pre-program operation towhich precharge through a source line SL is applied.

Referring to FIG. 14, at a first time t1, the precharge bias Vprc isapplied to the source line SL.

At a second time t2, the levels of the source select line SSL, theunselected word lines unsel_WL, and the selected word line sel_WL areincreased to the turn-on bias Von. The drain select line DSL maintainsthe turn-off level. Accordingly, the source select transistor SST andthe memory cells are turned on, and the drain select transistor DST isturned off. Thus, the memory string MS is coupled to the source line SL,and is separated from the bit line BL. In addition, the channel regionof the memory string MS is precharged through the source line SL.

At a third time t3, the levels of the source select line SSL, theunselected word lines unsel_WL, and the selected word line sel_WL aredecreased to the turn-off level.

At a fourth time t4, the level of the drain select line DSL is increasedto the turn-on bias Von. Accordingly, the memory string MS is coupled tothe bit line BL of the ground level.

At a fifth time t5, the selected word line sel_WL maintains the groundlevel, or is decreased to the negative level Vneg.

At a sixth time t6, the level of the unselected word lines unsel_WL isincreased to the pass bias Vpass. Accordingly, the floated source-sidechannel region S_CH is boosted, and the drain-side channel region D_CHhas the ground level. Since the source-side channel region S_CH isboosted in a precharged state, the source-side channel region S_CH isboosted to a level greater than that when a precharge operation is notperformed. Accordingly, the difference in potential level between thesource-side channel region S_CH and the drain-side channel region D_CHis further increased.

At a seventh time t7, the level of the selected word line sel_WL isincreased to the pre-program bias Vpre. Accordingly, hot electrons areinjected into the space region of the selected memory cell.

At an eighth time t8, the levels of the selected word line sel_WL andthe unselected word line unsel_WL are decreased to the ground level.Accordingly, the selected memory cell MCn and the unselected memorycells MC are turned off.

At a ninth time t9, the level of the drain select line DSL is decreasedto the ground level. Accordingly, the drain select transistor

DST is turned off, and the memory string MS is separated from the bitline BL.

At a tenth time t10, the level of the source line SL is decreased to theground level.

According to the operating method described above, the level of thesource-side channel region S_CH is boosted to a higher level by theprecharge through the source line SL, so that a larger quantity of hotelectrons may be injected into the space region.

FIG. 15 is a timing diagram illustrating a pre-program operation towhich precharge through a bit line BL is applied.

Referring to FIG. 15, at a first time t1, the precharge bias Vprc isapplied to the bit line BL.

At a second time t2, the levels of the drain select line DSL, theunselected word lines unsel_WL, and the selected word line sel_WL areincreased to the turn-on bias Von. The source select line SSL maintainsthe turn off level. Accordingly, the drain select transistor DST and thememory cell are turned on, and the source select transistor SST isturned off. Thus, the memory string MS is coupled to the bit line BL,and is separated from the source line SL. In addition, the channelregion of the memory string MS is precharged through the bit line BL.

At a third time t3, the levels of the drain select line DSL, theunselected word lines unsel_WL, and the selected word line sel_WL aredecreased to the turn-off level.

At a fourth time t4, the level of the source select line SSL isincreased to the turn-on bias Von. Accordingly, the memory string MS iscoupled to the source line SL of the ground level.

At a fifth time t5, the selected word line sel_WL maintains the groundlevel, or is decreased to the negative level Vneg.

At a sixth time t6, the level of the unselected word lines unsel_WL isincreased to the pass bias Vpass. Accordingly, the floated drain-sidechannel region D_CH is boosted, and the source-side channel region S_CHhas the ground level. Since the drain-side channel region D_CH isboosted in the precharged state, the drain-side channel region D_CH isboosted to a level greater than that when a precharge operation is notperformed. Accordingly, the difference in potential level between thesource-side channel region S_CH and the drain-side channel region D_CHis further increased.

At a seventh time t7, the level of the selected word line sel_WL isincreased to the pre-program bias Vpre. Accordingly, hot electrons areinjected into the space region of the selected memory cell.

At an eighth time t8, the levels of the selected word line sel_WL andthe unselected word line unsel_WL are decreased to the ground level.Accordingly, the selected memory cell MCn and the unselected memorycells MC are turned off.

At a ninth time t9, the level of the source select line SSL is decreasedto the ground level. Accordingly, the source select transistor is turnedoff, and the memory string MS is separated from the source line SL.

At a tenth time t10, the level of the bit line BL is decreased to theground level.

According to the operating method described above, the level of thedrain-side channel region D_CH is boosted to a higher level by theprecharge through the bit line BL, so that a larger quantity of hotelectrons may be injected into the space region.

FIG. 16 is a block diagram illustrating a memory system 1000 inaccordance with an embodiment of the present disclosure.

Referring to FIG. 16, the memory system 1000 includes a memory device100′ and a controller 200.

The controller 200 controls the memory device 100′ through a channel CH,and the memory device 100′ operates under the control of the controller200. The memory device 100′ includes a memory cell array having aplurality of memory blocks. In an embodiment, the memory device 100′ maybe the semiconductor device 100 described above, and be a flash memorydevice.

The controller 200 controls the memory device 100′ in response to arequest from a host 300. In addition, the memory device 100′ receives acommand and an address from the controller 200 through the channel CH,and accesses an area selected by the address in the memory cell array.That is, the memory device 100′ performs an internal operationcorresponding to the command on the area selected by the address.

Also, the controller 200 may control the memory device 100′ to perform aprogram operation, a read operation, an erase operation, or the like. Inthe program operation, the controller 200 provides the memory device100′ with a program command, an address, data, and the like through thechannel CH, and the memory device 100′ programs the data in an areaselected by the address. In the erase operation, the controller 200provides the memory device 100′ with an erase command, an address, andthe like through the channel CH, and the memory device 100′ erases datastored in an area selected by the address. In the read operation, thecontroller 200 provides the memory device 100′ with a read command, anaddress, and the like through the channel CH, and the memory device 100′reads data from an area selected by the address.

The read operation includes not only a read operation for reading andoutputting data stored in a memory cell but also a read operation as averify operation accompanied by the program or erase operation.

When a program operation is requested from the host 300, the controller200 commands the memory device 100′ to perform a pre-program operationand a program operation, using the method described with reference toFIGS. 6 to 15. That is, the pre-program operation is performed byboosting a first channel region of a memory string and then applying apre-program bias to a selected word line, and the program operation isthen performed. According to this method, holes of a space are removedprior to the program operation, and thus the reliability of dataprogrammed in memory cells may be ensured.

FIG. 17 is a block diagram illustrating a memory system 2000 inaccordance with an embodiment of the present disclosure.

Referring to FIG. 17, the memory system 2000 includes a memory device2100 and a controller 2200.

The memory device 2100 may be a semiconductor device, and include aplurality of memory chips. The plurality of memory chips are dividedinto a plurality of groups. The plurality of groups communicate with thecontroller 2200 respectively through first to kth channels CH1 to CHk.Each memory chip may be configured and operated similarly to thesemiconductor device 100 described with reference to FIG. 1.

Each group communicates with the controller 2200 through one commonchannel. The controller 2200 is configured identically to the controller200 described with reference to FIG. 16. The controller 2200 controlsthe plurality of memory chips of the memory device 2100 through theplurality of channels CH1 to CHk. The memory system 2000 may be modifiedsuch that one memory chip is coupled to one channel.

The controller 2200 and the memory device 2100 may be integrated into asingle semiconductor device. In an embodiment, the controller 2200 andthe memory device 2100 may be integrated into a single semiconductordevice to constitute a memory card. For example, the controller 2200 andthe memory device 2100 may be integrated into a single semiconductordevice to constitute a memory card such as a personal computer (PC) card(e.g., Personal Computer Memory Card International Association (PCMCIA)card), a Compact Flash (CF) card, a Smart Media Card (e.g., SM and SMC),a memory stick, a Multi-Media Card (e.g., MMC, RS-MMC, MMCmicro andeMMC), a secure digital (SD) card (e.g., SD, miniSD, microSD and SDHC),and a Universal Flash Storage (UFS).

The controller 2200 and the memory device 2100 may be integrated intoone semiconductor device to constitute a semiconductor drive (e.g., asolid state drive (SSD)). The SSD includes a storage device configuredto store data in a semiconductor memory. When the memory system 2000 isused as the semiconductor drive SSD, the operating speed of a host Hostcoupled to the memory system 2000 may be remarkably improved.

In another example, the memory system 2000 may be provided as one ofvarious components of an electronic device such as a computer, an UltraMobile PC (UMPC), a workstation, a net-book, a Personal DigitalAssistant (PDA), a portable computer, a web tablet, a wireless phone, amobile phone, a smart phone, an e-book, a Portable Multimedia Player(PMP), a portable game console, a navigation system, a black box, adigital camera, a 3-dimensional television, a digital audio recorder, adigital audio player, a digital picture recorder, a digital pictureplayer, a digital video recorder, a digital video player, a devicecapable of transmitting/receiving information in a wireless environment,one of various electronic devices that constitute a home network, one ofvarious electronic devices that constitute a computer network, one ofvarious electronic devices that constitute a telematics network, an RFIDdevice, or one of various components that constitute a computing system.

FIG. 18 is a block diagram illustrating a computing system 3000 inaccordance with an embodiment of the present disclosure.

Referring to FIG. 18, the computing system 3000 includes a centralprocessing unit (CPU) 3100, a random access memory (RAM) 3200, a userinterface 3300, a power supply 3400, a system bus 3500, and a memorysystem 2000.

The memory system 2000 is electrically coupled to the central processingunit 3100, the RAM 3200, the user interface 3300, and the power supply3400 through the system bus 3500. Data supplied through user interface3300 or data processed by the central processing unit 3100 are stored inthe memory system 2000.

A memory device 2100 is coupled to the system bus 3500 through acontroller 2200. When the memory device 2100 is directly coupled to thesystem bus 3500, the function of the controller 2200 may be performed bythe central processing unit 3100 and the RAM 3200.

The computing system 3000 may be configured to include the memory system2000 described with reference to FIG. 17 or to include the memory system1000 described with reference to FIG. 16. In addition, the computingsystem 3000 may be configured to include both the memory systems 1000and 2000 described with reference to FIGS. 16 and 17.

According to the present disclosure, there may be provided asemiconductor device having improved operating characteristics andreliability, and an operating method of the semiconductor device.

Example embodiments have been disclosed herein, and although specificterms are employed, the terms are used and are to be interpreted in ageneric and descriptive sense only, and not for purpose of limitation.In some instances, as would be apparent to one of ordinary skill in theart as of the filing of the present application, features,characteristics, and/or elements described in connection with aparticular embodiment may be used singly or in combination withfeatures, characteristics, and/or elements described in connection withother embodiments unless otherwise specifically indicated. Accordingly,it will be understood by those of skill in the art that various changesin form and details may be made without departing from the spirit andscope of the present disclosure as set forth in the following claims.

What is claimed is:
 1. A semiconductor device comprising: a memorystring coupled between a source line and a bit line, the memory stringincluding at least one source select transistor, a plurality of memorycells, and at least one drain select transistor, wherein a channelregion of the memory string includes a first channel region at one sideof a selected memory cell among the plurality of memory cells and asecond channel region at the other side of the selected memory cell; anda control logic configured to boost the first channel region, apply apre-program bias to a gate electrode of the selected memory cell suchthat electrons are injected into a space region of the selected memorycell, and apply a program bias to the gate electrode.
 2. Thesemiconductor device of claim 1, wherein, after the memory string iscoupled to the bit line, the first channel region is boosted by turningoff the selected memory cell and applying a pass bias to gate electrodesof unselected memory cells among the plurality of memory cells.
 3. Thesemiconductor device of claim 2, wherein the memory string is coupled tothe bit line of a ground level.
 4. The semiconductor device of claim 2,wherein, when the selected memory cell is turned off, a negative bias isapplied to a word line coupled to the selected memory cell.
 5. Thesemiconductor device of claim 2, wherein the pre-program bias is greaterthan the pass bias.
 6. The semiconductor device of claim 1, wherein thepre-program bias is less than the program bias.
 7. The semiconductordevice of claim 1, wherein, when the pre-program bias is applied, thepre-program bias is applied to at least one unselected memory celladjacent to the selected memory cell among the unselected memory cells.8. The semiconductor device of claim 1, wherein, after the channelregion is precharged, the first channel region is boosted.
 9. Thesemiconductor device of claim 1, wherein the first channel region isselectively boosted in the channel region.
 10. The semiconductor deviceof claim 1, wherein the pre-program bias is applied after the firstchannel region is boosted.
 11. The semiconductor device of claim 1,wherein the program bias is applied after the pre-program bias isapplied.
 12. A semiconductor device comprising: a memory string coupledbetween a source line and a bit line, the memory string including atleast one first select transistor, a plurality of memory cells, and atleast one second select transistor, wherein a channel region of thememory string includes a first channel region at one side of a selectedmemory cell among the plurality of memory cells and a second channelregion at the other side of the selected memory cell; and a controllogic configured to couple the memory string to the source line or thebit line, turn off a selected memory cell, increase a level of wordlines coupled to unselected memory cells among the plurality of memorycells to a pass bias such that the first channel region and the secondchannel region have different potential levels, increase a level of aword line coupled to the selected memory cell to a pre-program biasgreater than the pass bias, and apply a program bias to the word linecoupled to the selected memory cell.
 13. The semiconductor device ofclaim 12, wherein the pre-program bias is applied after the firstchannel region is boosted.
 14. The semiconductor device of claim 13,wherein the program bias is applied after the pre-program bias isapplied.
 15. A semiconductor device comprising: a source line; a bitline; a plurality of memory cells including a selected memory cell, afirst group of unselected memory cells between the source line and theselected memory cell, and a second group of unselected memory cellsbetween the selected memory cell and the bit line; a first channelregion including channel regions of the first group of unselected memorycells; a second channel region including channel regions of the secondgroup of unselected memory cells; and a control logic suitable for:boosting one of the first and second channel regions; applying apre-program bias to the selected memory cell; and applying a programbias to the selected memory cell and a pass bias to the unselectedmemory cells, wherein the pre-program bias is less than the program biasand greater than the pass bias.